SONATAOS

Was a leader of a number of design projects in the area of the optical systems for photolithography Developed a family of projection objectives for the 405, 365, 270, 266, 248, 193 nm steppers. Education... In 1988 the paper on the methodes of simulation and design of lithographic projection lenses was nominated the best in the industry

Also known as: Sonata Optical Systems GmbH, sonataos gmbh

Registration numbers: HRB 100927 (W)

VAT numbers: DE 288741477

Primary location: Saarbruecken Chile